Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions
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File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | ||
File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | ||
File:PR strip.png|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''' | |||
</gallery> | </gallery> | ||
[[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']] | [[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']] | ||