Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions
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<gallery caption="" widths="350px" heights="130px" perrow="2"> | <gallery caption="" widths="350px" heights="130px" perrow="2"> | ||
File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | File:BSi free.png|350px|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | ||
File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | File:BSi full.png|350px|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | ||
</gallery> | </gallery> | ||