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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions

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<gallery caption="" widths="400px" heights="300px" perrow="2">
<gallery caption="" widths="400px" heights="300px" perrow="2">
[File:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''']
File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe'''''
[File:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']
File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe'''''
</gallery>
</gallery>


[[File:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''']]
[[File:BSi free.png|400px|left|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''']]


[[File:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']]
[[File:BSi full.png|400px|left|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']]


[[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']]
[[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']]