Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions
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<gallery caption="" widths="400px" heights="300px" percol="2"> | <gallery caption="" widths="400px" heights="300px" percol="2"> | ||
File:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | |||
File:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | |||
</gallery> | </gallery> | ||