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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions

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Vthongu (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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<gallery caption="" widths="400px" heights="300px" percol="2">
<gallery caption="" widths="400px" heights="300px" percol="2">
image:BSi free.png| 1. 3D silicon photonic crystal membranes.
image:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe'''''
image:BSi full.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process.
image:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe'''''
</gallery>
</gallery>


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