Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions
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<gallery caption="" widths="400px" heights="300px" perrow="2"> | <gallery caption="" widths="400px" heights="300px" perrow="2"> | ||
image:BSi free.png| 1. 3D silicon photonic crystal membranes. | |||
image:BSi full.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process. | |||
</gallery> | |||
[[File:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''']] | [[File:BSi free.png|400px|center|thumb|''''' 1 µm silicon pillars etched with a BSi-free recipe''''']] | ||
[[File:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']] | [[File:BSi full.png|400px|center|thumb|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']] | ||
[[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']] | [[File:PR strip.png|800px|left|thumb|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']] | ||