Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions

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	[[File:BSi full.png\|400px\|left\|thumb\|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']]		[[File:BSi full.png\|400px\|left\|thumb\|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''']]

			[[File:PR strip.png\|400px\|left\|thumb\|''''' By removing the mask on top of the pillars, the BSi can be formed on top of the these pillars''''']]