Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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*[[/Si Nano etching | *[[/Si Nano etching/Nanoscale silicon etching with SF<sub>6</sub> and O<sub>2</sub>]] | ||
*[[/Si Nano etching | *[[/Si Nano etching/Black silicon on Demand]] | ||
Revision as of 11:03, 11 May 2020
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This system is a research tool and not available to the users
If you want to get access to the tool, then take to professor Henry Jansen
- [[/Si Nano etching/Nanoscale silicon etching with SF6 and O2]]
- /Si Nano etching/Black silicon on Demand