Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions

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	[[File:Fig 13a.png\|800px~~\|thumb~~]]		[[File:Fig 13a.png\|800px]]

	'''''Submicron silicon trenches and lines derived from the fine-tuned CORE sequence.'''''		'''''Submicron silicon trenches and lines derived from the fine-tuned CORE sequence.'''''