Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions
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<gallery caption="" widths="380px" heights="300px" perrow="3"> | <gallery caption="" widths="380px" heights="300px" perrow="3"> | ||
[[File: | [[File:TheCORErecipe.png]]| 1. The CORE recipe. | ||
</gallery> | </gallery> | ||