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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions

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<gallery caption="" widths="380px" heights="300px" perrow="3">
<gallery caption="" widths="380px" heights="300px" perrow="3">
image:TheCORErecipe.png| 1. 3D silicon photonic crystal membranes.  
 
[[File:The CORE recipe.png]]| 1. The CORE recipe.  


</gallery>
</gallery>