Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 5: | Line 5: | ||
<gallery caption="" widths="380px" heights="300px" perrow="3"> | <gallery caption="" widths="380px" heights="300px" perrow="3"> | ||
image: | image:Figure_1.png| 1. 3D silicon photonic crystal membranes. | ||
</gallery> | </gallery> | ||