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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions

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<gallery caption="" widths="380px" heights="300px" perrow="3">
<gallery caption="" widths="380px" heights="300px" perrow="3">
image:The CORE recipe.png| 1. 3D silicon photonic crystal membranes.  
image:Figure_1.png| 1. 3D silicon photonic crystal membranes.  


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</gallery>