Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions
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Below are images illustrating works that have been done during the ph.d. projects. | Below are images illustrating works that have been done during the ph.d. projects. | ||
<gallery caption="" widths="380px" heights="300px" perrow="3"> | <gallery caption="" widths="380px" heights="300px" perrow="3"> | ||
image: | image:3D.png| 1. 3D silicon photonic crystal membranes. | ||
image:Scallops.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process. | image:Scallops.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process. | ||
image:3Dmicro.png| 3. 3D silicon microstructures fabricated by DREM process. | image:3Dmicro.png| 3. 3D silicon microstructures fabricated by DREM process. | ||