Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
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'''This section is under construction [[Image:section under construction.jpg|70px]]''' | '''This section is under construction [[Image:section under construction.jpg|70px]]''' | ||
In order to get good alignment, it is advised to use four alignment marks for alignment, and to activate scaling (possibly also shearing) before starting the exposure. It is recommended to use the "High Res" camera for the final alignment of each mark in order to achieve the best overlay accuracy. | |||
==Top Side Alignment== | ==Top Side Alignment== | ||