Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Overlay accuracy (spec):''' 1.0µm | '''Overlay accuracy (spec):''' 1.0µm | ||
'''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5mm from the center. | '''BSA windows:''' along the X and Y axes, 10mm wide x 46mm long, starting 14.5mm from the center. | ||
'''Camera field of view (W x H):''' 640µm x 480µm | '''Camera field of view (W x H):''' 640µm x 480µm | ||