Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions
→Comparison of the methods for deposition of Silicon Oxide: added cluster sputterer |
→Deposition of Silicon Oxide using sputter deposition technique: added cluster sputter chamber |
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==Deposition of Silicon Oxide using sputter deposition technique== | ==Deposition of Silicon Oxide using sputter deposition technique== | ||
At DTU Nanolab you can also deposit silicon oxide using the Sputter System [[Specific Process Knowledge/Thin film deposition/Lesker|(Lesker)]] or the [[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE Ionfab300]] | At DTU Nanolab you can also deposit silicon oxide using the Sputter-System [[Specific Process Knowledge/Thin film deposition/Lesker|(Lesker)]], the [[Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_high_vacuum_sputtering_deposition_system|Sputter-System Metal Oxide(PC1)]] or the [[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE Ionfab300]] | ||
sputter system. One of the advantages here is that you can deposit on many kinds of material. | sputter system. One of the advantages here is that you can deposit on many kinds of material. | ||
*[[/Deposition of Silicon Oxide using Lesker sputter tool|Deposition of Silicon Oxide using Lesker sputter tool]] | *[[/Deposition of Silicon Oxide using Lesker sputter tool|Deposition of Silicon Oxide using Lesker sputter tool]] | ||
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/IBSD of SiO2|Deposition of Silicon Oxide using IBE/IBSD Ionfab300]] | *[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/IBSD of SiO2|Deposition of Silicon Oxide using IBE/IBSD Ionfab300]] | ||
*[[Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_high_vacuum_sputtering_deposition_system#Standard_recipe_performance|Deposition conditions in Sputter-System Metal Oxide(PC1)]] | |||
==Deposition of Silicon Oxide using ALD== | ==Deposition of Silicon Oxide using ALD== | ||