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Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions

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m Nickel deposition: added link w info on deposition rate
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m Nickel deposition: about allowed materials in lesker
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* Metals  
* Metals  
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* Silicon
* Almost any that do not outgas.
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* Metals
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*Almost any that do not outgas. Check the cross-contamination sheets in Labmanager.
*Almost any that do not outgas. Check the cross-contamination sheets in Labmanager.