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| *Purpose 3 --> | | *Purpose 3 --> |
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
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| |style="background:LightGrey; color:black"| 20x20mm substrate
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| |style="background:WhiteSmoke; color:black"|
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| *Removal rate: 400nm/min
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| *Thickness accuracy: +/- ? µm
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| *Thickness homogeneity: +/- ? µm
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| *Roughness: +/- ? µm
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| <!-- |style="background:WhiteSmoke; color:black"|
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| *Performance range 1
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| *Performance range 2
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| *Performance range 3 -->
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| |-
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| |style="background:LightGrey; color:black"|100mm substrate
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| |style="background:WhiteSmoke; color:black"|
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| *Removal rate: ~ 60 nm/min
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| *Thickness accuracy: ? µm
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| *Thickness homogeneity: ? µm
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| *Roughness: +/- ? µm
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| <!-- |style="background:WhiteSmoke; color:black"|
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| *Performance range -->
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| |- | | |- |
| !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range | | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range |
