LabAdviser/314/Microscopy 314-307/Technique/X-ray spectroscopy/EDS-SEM

Feedback to this page: click here

(content by Berit Wenzell, April 2020)

EDS-SEM Quick Guide

1) Link the working distance (WD) and bring Z-height to 10mm WD

2) Launch Aztec and save the file on the shared drive

3) Insert EDS detector

4) Select high-voltage (HV)

Select an accelerating voltage that is 2-3x higher than the energy characteristic X-ray you want to generate from the element with the highest atomic number (Z)

Could be 15kV for silicates…, 20kV for metal

5) Select operating mode

• Point & ID: acquire image, select a point or area of interest for analysis
• Mapping: elemental distribution in region of interest
• Optimization: calibrate if needed – see below if needed.

6) Select process time

• High number – good energy resolution
• Low number – good counting statistic

Could be 5 for Point & ID 2 for Mapping

7) Bring the dead time to 30 – 50 %

Change the dead time by changing the beam current (spot or aperture)

The beam current cannot be higher than what the sample allows, to avoid charging and beam damage. To avoid beam induced effects, accept a low dead time and count for a longer time.

If the dead time is 100% turn off the CCD.

8) Aztec software

Use the software to acquire data and process data.

Aztec software flow

Fill out the settings from left to right. Acquire image, spectrum. Process the data.

9) After use, retract the detector