Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
Added small section linking to the information about particulates in Au films |
m →Au deposition: corrected deposition rate for Lesker |
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| Line 52: | Line 52: | ||
|0.5-10 Å/s | |0.5-10 Å/s | ||
|1-10 Å/s | |1-10 Å/s | ||
|Depends on process parameters, | |Depends on process parameters, 1-10 Å/s | ||
|Depends on process parameters | |Depends on process parameters | ||
|5-10 Å/s | |5-10 Å/s | ||