Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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-| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3mm in diameter, the alignment mark is 300µm. The blue cross-hair is ~400µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20µm wide. The blue cross-hair is ~7µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the central cross are 3µm wide. The blue cross-hair is ~2µm.
+| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3mm in diameter, the alignment mark is 300µm. The blue cross-hair is ~400µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The mark is 300µm wide. The blue cross-hair is ~18µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20µm wide. The blue cross-hair is ~7µm.
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