Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
m →Comparison of the two stylus profilers, the optical profiler and the AFM: plurals in title |
m →Comparison of the stylus profilers, the optical profilers and the AFMs: spelling mistake |
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| Line 49: | Line 49: | ||
|Depending on the objective: | |Depending on the objective: | ||
*One view: 127µmX95µm to 1270µmX955µm | *One view: 127µmX95µm to 1270µmX955µm | ||
*Stitching: In principel a | *Stitching: In principel a whole 6" wafer (time consuming) | ||
|Only 10x objective: 2.0 mm x 1.7 mm | |Only 10x objective: 2.0 mm x 1.7 mm | ||
|90 µm square | |90 µm square | ||