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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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'''Camera field of view (W x H):''' 640µm x 480µm
'''Camera field of view (W x H):''' 640µm x 480µm
The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks.
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