Specific Process Knowledge/Characterization/XPS: Difference between revisions
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|style="background:LightGrey; color:black"|Depth profiles | |style="background:LightGrey; color:black"|Depth profiles | ||
|style="background:WhiteSmoke; color:black"|Depth profiles with single Ar ion bombardment | |style="background:WhiteSmoke; color:black"|Depth profiles with single Ar ion bombardment | ||
* Monoatomic energy range 200- | * Monoatomic energy range 200-3000 eV | ||
|style="background:WhiteSmoke; color:black"|Depth profiles with MonoAtomic and Gas Cluster Ion Source ([[Media:MAGCIS.pdf |MAGCIS]]) | |style="background:WhiteSmoke; color:black"|Depth profiles with MonoAtomic and Gas Cluster Ion Source ([[Media:MAGCIS.pdf |MAGCIS]]) | ||
* Monoatomic energy range 200- | * Monoatomic energy range 200-4000 eV | ||
* Cluster mode energy range: 2-8 keV | * Cluster mode energy range: 2-8 keV | ||
*Cluster size range: 75-2000 atoms | *Cluster size range: 75-2000 atoms | ||