Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|Profiler for measuring micro structures. Can do wafer mapping and stress measurements. | |Profiler for measuring micro structures. Can do wafer mapping and stress measurements. | ||
|3D Profiler for measuring micro structures and surface roughness. Can do wafer mapping. | |3D Profiler for measuring micro structures and surface roughness. Can do wafer mapping. | ||
|3D Profiler for measuring micro structures and surface roughness. Can do wafer mapping. | |3D Profiler for measuring micro structures and surface roughness. Can do wafer mapping. Positioned in the basement. | ||
|AFM for measuring nanostructures and surface roughness | |AFM for measuring nanostructures and surface roughness | ||
|Profiler for measuring micro structures. | |Profiler for measuring micro structures. | ||