Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 96: | Line 96: | ||
|Depending on material and trench width: | |Depending on material and trench width: | ||
*Somewhere between 1:1 and 1:12 | *Somewhere between 1:1 and 1:12 | ||
| | |Depending on material and trench width. | ||
|~1:1 with standard cantilever. | |~1:1 with standard cantilever. | ||
| | | | ||