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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
Line 85: Line 85:
*Confocal (depending on objective): 1nm -> 50nm
*Confocal (depending on objective): 1nm -> 50nm
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*PSI down to ? nm
*Accuracy 0.7%
*VSI down to ? nm
*Precision 0.1%
|<1Å - accuracy better than 2%
|<1Å - accuracy better than 2%
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|&nbsp;
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