Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 60: | Line 60: | ||
|Depending on the objective and Z resolution: | |Depending on the objective and Z resolution: | ||
*94.4 µm ->9984 µm | *94.4 µm ->9984 µm | ||
|10 mm | |10 mm (piezo range 500 µm) | ||
|1 µm (can go up to 5 µm under special settings) | |1 µm (can go up to 5 µm under special settings) | ||
|130 nm | |130 nm | ||