Specific Process Knowledge/Characterization/XPS: Difference between revisions
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|style="background:WhiteSmoke; color:black"|Depth profiles with single Ar ion bombardment | |style="background:WhiteSmoke; color:black"|Depth profiles with single Ar ion bombardment | ||
* Monoatomic energy range 200-3 keV | * Monoatomic energy range 200-3 keV | ||
|style="background:WhiteSmoke; color:black"|Depth profiles with MonoAtomic and Gas Cluster Ion Source (MAGCIS) | |style="background:WhiteSmoke; color:black"|Depth profiles with MonoAtomic and Gas Cluster Ion Source ([file:MAGCIS.pdf |MAGCIS]) | ||
* Monoatomic energy range 200-4 keV | * Monoatomic energy range 200-4 keV | ||
* Cluster mode energy range: 2-8 keV | * Cluster mode energy range: 2-8 keV | ||