Specific Process Knowledge/Characterization/XPS: Difference between revisions
Appearance
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* Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS) | * Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS) | ||
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!rowspan=" | !rowspan="5" style="background:silver; color:black" align="left"| Performance | ||
|style="background:LightGrey; color:black"|Spot size | |style="background:LightGrey; color:black"|Spot size | ||
|style="background:WhiteSmoke; color:black"|XPS: 30µm - 400µm | |style="background:WhiteSmoke; color:black"|XPS: 30µm - 400µm | ||