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Specific Process Knowledge/Characterization/XPS: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
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* Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS)
* Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS)
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!rowspan="6" style="background:silver; color:black" align="left"| Performance
!rowspan="5" style="background:silver; color:black" align="left"| Performance
|style="background:LightGrey; color:black"|Spot size
|style="background:LightGrey; color:black"|Spot size
|style="background:WhiteSmoke; color:black"|XPS: 30µm - 400µm
|style="background:WhiteSmoke; color:black"|XPS: 30µm - 400µm