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Specific Process Knowledge/Thin film deposition/Deposition of Titanium Nitride: Difference between revisions

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Thin films of titanium nitride can only be deposited in the [[Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)|ALD2]] at the moment. More information about the process can be found [[Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/TiN deposition using ALD2|here]].
Thin films of titanium nitride can only be deposited in the [[Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)|ALD2]] at the moment. More information about the process can be found [[Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/TiN deposition using ALD2|here]].


==Comparison between sputtering and ALD methods for deposition of Titanium nitride.==
==Comparison between sputtering and ALD methods for deposition of Titanium Nitride.==


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