Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions

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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Noco IR[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|346-901
|346-901
|Wet chemistry
|Wet chemistry
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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #2[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|C1
|C1
|Thin Film
|Thin Film
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|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Zeiss Jenatech[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|C1
|C1
|Thin Film
|Thin Film
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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #1[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|D3
|D3
|Thin Film
|Thin Film
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|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leitz Medilux[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
|D3
|D3
|Thin Film
|Thin Film
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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200N #3[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|E4
|E4
|Lithography
|Lithography
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|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200N #4[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|E5
|E5
|Lithography
|Lithography
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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon ME 600[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|F1
|F1
|Thin Film
|Thin Film
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|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leica S8 APO[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|F2
|F2
|Thin Film
|Thin Film
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|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Zeiss Axiotron[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|F3
|F3
|Lithography
|Lithography

Revision as of 14:03, 3 April 2020

THIS PAGE IS UNDER CONSTRUCTION

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Zeiss Jenatech (strain) Nikon SMZ 1500 Leica S8 APO Leitz Medilux Zeiss Axiotron 2 Zeiss Jenatech (particles measurements) Noco IR microscope Nikon SMZ 1000 Nikon ME 600 Nikon Eclipse L200 Nikon Eclipse L200 (2) Nikon ECLIPSE L200N 3 Nikon ECLIPSE L200N 4
Location Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager
Special features Wollastron prism Stereoscopic microscope Stereoscopic microscope No No No Infra red (IR) camera Stereoscopic microscope Wollastron prism Motorized stage

auto scan guide

No No No
Ocular magnification 10x No No 10x 10x 10x 10x No 10x 10x 10x 10x 10x
Objective magnification 2.5x, 5x, 10x, 20x, 50x Zoom 100x Zoom 80x 2.5x, 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 20x, 50x Zoom 100x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x
Bright field Yes No No Yes Yes Yes Yes No Yes Yes Yes Yes Yes
Dark field Yes No No No Yes Yes No No Yes Yes Yes Yes Yes
Polarizer Yes No No No No Yes No No Yes No No No No
Episcopic light (reflected light) Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
Diascopic light (transmitted light) No Yes No Yes Yes No Yes No No Yes Yes Yes Yes
View with eye Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
View on screen (camera) Yes No No Yes Yes No Yes (IR) No Yes Yes Yes Yes Yes
Measurement option No No No No Yes No No No No Yes Yes Yes Yes


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage Nikon Eclipse L200 auto scan guide

THIS PAGE IS UNDER CONSTRUCTION

Microscope Location Responsible Group Objectives Ocular Special features Features Camera Analysis software
Nikon SMZ 1000
 346-901 Wet chemistry Zoom 0.8x - 8x 10x Stereoscopic microscope Episcopic No No
Noco IR
 346-901 Wet chemistry
  • 2.5x
  • 10x
  • 20x
  • 50x
 10x IR imaging
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
 IR camera No
Leica INM100
 346-901 Wet chemistry
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi2 NIS-D
Nikon Eclipse L200 #2
 C1 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi1 NIS-D
Zeiss Jenatech
 C1 Thin Film
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
 No No
Nikon Eclipse L200 #1
 D3 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x Motorized stage
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi1 NIS-BR
Leitz Medilux
 D3 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
 DX40-274FW Kappa Control Center
Nikon Eclipse L200N #3
 E4 Lithography
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • DS-Fi2
  • C-mount, 0.7x relay
 NIS-D
Nikon Eclipse L200N #4
 E5 Lithography
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • DS-Fi2
  • C-mount, 0.7x relay
 NIS-D
Nikon ME 600
 F1 Thin Film
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Brightfield
  • Darkfield
 DS-Fi2 NIS-D
Leica S8 APO
 F2 Thin Film Zoom 1x - 8x 10x Stereoscopic microscope Episcopic No No
Zeiss Axiotron
 F3 Lithography
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 Infinity X DeltaPix


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