Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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== Modification of the showerhead== | == Modification of the showerhead== | ||
--[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 20 November 2015 | --[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 20 November 2015 | ||
This section applies to all Pegasus tools. | |||
It is clear that optimizing the Bosch processes on the Pegasus can be done in countless ways. Reducing the cycle time is a very convenient way of getting rid of, or at least reducing, scallops. The faster the process switches the smaller the scallops will be. However, at some point the hardware (MFS's, RF generators, APC valve) cannot keep up with the demand and the process will essentially be continuous causing the Bosch process to break down. In its original setup, the Pegasus had standard processes with cycle durations down to 2 seconds. The hardware on the Pegasus is indeed very fast and allows faster switching. The limiting factor in the Bosch process was identified by Henri Jansen - and we have taken steps to improve this as described below. | It is clear that optimizing the Bosch processes on the Pegasus can be done in countless ways. Reducing the cycle time is a very convenient way of getting rid of, or at least reducing, scallops. The faster the process switches the smaller the scallops will be. However, at some point the hardware (MFS's, RF generators, APC valve) cannot keep up with the demand and the process will essentially be continuous causing the Bosch process to break down. In its original setup, the Pegasus had standard processes with cycle durations down to 2 seconds. The hardware on the Pegasus is indeed very fast and allows faster switching. The limiting factor in the Bosch process was identified by Henri Jansen - and we have taken steps to improve this as described below. | ||
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== RF Matching == | == RF Matching == | ||
--[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 15 May 2018 | --[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 15 May 2018 | ||
These sections and subsection apply to all Pegasus tools. | |||
=== RF matching in general === | === RF matching in general === | ||
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== The Picoscope == | == The Picoscope == | ||
This section applies to Pegasus 1, 2 and 3. | |||
The process monitoring on Pegasus 1, 2 and 3 has been dramatically improved with the installation of the Picoscope. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|'''HERE''']] to access a page on the Picoscope only. | The process monitoring on Pegasus 1, 2 and 3 has been dramatically improved with the installation of the Picoscope. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|'''HERE''']] to access a page on the Picoscope only. | ||
== The Claritas endpoint system == | == The Claritas endpoint system == | ||
This section applies to Pegasus 1. | |||