Specific Process Knowledge/Thin film deposition/Deposition of NiV: Difference between revisions
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==Sputtering of Nickel Vanadium== | ==Sputtering of Nickel Vanadium== | ||
Nickel Vanadium may be sputter deposited in either Sputter-system (Lesker) or Wordentec | Nickel Vanadium may be sputter deposited in either Sputter-system (Lesker) or Wordentec. The following pages show both process parameters and data on surface roughness of the deposited films | ||
* [[/Sputtering of NiV in Lesker|Sputtering of NiV in Lesker]] | * [[/Sputtering of NiV in Lesker|Sputtering of NiV in Lesker]] | ||