Specific Process Knowledge/Etch: Difference between revisions
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'''Advantages of wet chemistry over dry etch techniques are:''' | '''Advantages of wet chemistry over dry etch techniques are:''' | ||
* | *An often high etch rate difference of different materials giving raise to a high selectivity of the material to be etched compared to underlaying layers or mask materials. | ||
*Time saving: You can often etch 25 wafers at a time in wet chemistry where as dry etch equipment can only handle one wafer at a time. | *Time saving: You can often etch 25 wafers at a time in wet chemistry where as dry etch equipment can only handle one wafer at a time. | ||
*Easy to start op new etch solutions. | *Easy to start op new etch solutions. | ||