Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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The Pegasus has a lot of advanced processing options. | The Pegasus has a lot of advanced processing options. | ||
# '''Multiplexing''': As described above, the multiplexed Bosch process may have the etch or passivation cycle each split into three separate phases: Delay, Boost and Main. | # '''Multiplexing''': As described above, the multiplexed Bosch process may have the etch or passivation cycle each split into three separate phases: Delay, Boost and Main. The duration of each individual phase (delay, boost and main) for each individual process parameter (pressure, gases and RF generators) may be given any value thus enabling the phases to run asynchronously. This gives an infinite process parameter space... | ||
# '''Ramping''':Using the ramp option one can change process parameters linearly over the course of each processing step. | # '''Ramping''':Using the ramp option one can change process parameters linearly over the course of each processing step. | ||
# '''Process steps''': Stich any number of processing steps with different parameters to make one continuous process. | # '''Process steps''': Stich any number of processing steps with different parameters to make one continuous process. | ||
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## ''Spacers '': The distance to the plasma source may be changed by using different spacers. | ## ''Spacers '': The distance to the plasma source may be changed by using different spacers. | ||
## ''Baffle and funnel'': The funnel inside the chamber helps to focus the plasma/ions towards the electrode. They may be taken out but don't expect this option to be part of the parameters that you can change in your experiments. | ## ''Baffle and funnel'': The funnel inside the chamber helps to focus the plasma/ions towards the electrode. They may be taken out but don't expect this option to be part of the parameters that you can change in your experiments. | ||
== Modification of the showerhead== | == Modification of the showerhead== | ||