Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== The Bosch process == | == The Bosch process == | ||
The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses/TPT_Dry_Etch| Dry Etch TPT course | The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses/TPT_Dry_Etch| Dry Etch TPT course]] is mandatory for all new users. On the TPT web page you will find a version of the latest lecture slides - here you will find information as well. | ||
== Links to the individual pages for the Pegasi == | == Links to the individual pages for the Pegasi == | ||