LabAdviser/314/Microscopy 314-307/SEM/AFEG: Difference between revisions
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*'''Electron source''' | *'''Electron source''' | ||
Field emission gun | **Field emission gun | ||
*'''Accelerating voltage''' | *'''Accelerating voltage''' | ||
500 V- 30 kV | **500 V- 30 kV | ||
*'''Resolution''' | *'''Resolution''' | ||
2 nm at 30 kV (SE) | **2 nm at 30 kV (SE) | ||
*'''Imaging detectors''' | *'''Imaging detectors''' | ||
Everhart-Thornley (SE/BSE) | **Everhart-Thornley (SE/BSE) | ||
**Solid State BSE | |||
**Large Field (LVD) | |||
**Gaseous SE (GSED) | |||
**Gaseous BSE | |||
**Gaseous Analytical (GAD) | |||
**STEM | |||
**vCD | |||
*'''Imaging modes''' | *'''Imaging modes''' | ||
High and low vacuum | High and low vacuum | ||
*'''Analytical capabilities''' | *'''Analytical capabilities''' | ||
Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV) | **Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV) | ||
Wavelength Dispersive Spectrosopy | **Wavelength Dispersive Spectrosopy | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||