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Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Difference between revisions

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== Tantalum deposition ==
== Tantalum deposition ==


Tantalum can be deposited by e-beam evaporation and sputter deposition. In the chart below you can compare the different deposition equipment.  
Tantalum can be deposited by e-beam evaporation and sputter deposition. In the chart below you can compare the different deposition equipment.
 
You can read more about Ta sputter deposition [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Tantalum/Sputtering of Ta|here]].  




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