Specific Process Knowledge/Etch/III-V ICP: Difference between revisions
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Name: PRO ICP <br> | Name: PRO ICP <br> | ||
Vendor: STS (now SPTS) <br> | Vendor: STS (now SPTS) <br> | ||
The III-V ICP is a state-of-the-art etch tool. The combination of advanced hardware and software enables you to either use the optimized standard processes or to tailor etch processes for your specific needs. The tool can be used for etching of different materials, but is primarily intented for etching of III-V materials. | The III-V ICP is a state-of-the-art etch tool. The combination of advanced hardware and software enables you to either use the optimized standard processes or to tailor etch processes for your specific needs. The tool can be used for etching of different materials, but is primarily intented for etching of III-V materials. There are two endpoint systems connected to the system. An Optical End Point System (OES) and a LASER End Point system (LEP). Information on these can be found here: [[Specific Process Knowledge/Etch/DryEtchProcessing]] | ||
'''The user manual, user APV and contact information can be found in LabManager:''' | '''The user manual, user APV and contact information can be found in LabManager:''' | ||