LabAdviser/314/Microscopy 314-307/SEM/Nova: Difference between revisions
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==Equipment performance and process related parameters== | |||
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!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment | |||
|style="background:WhiteSmoke; color:black" align="center"|QFEG Cryo SEM FEI Quanta FEG 200 | |||
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!style="background:silver; color:black;" align="center" width="60"| Purpose | |||
|style="background:LightGrey; color:black" "rowspan="2"| Vizualization and Microanalysis | |||
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* Vizualization of surfaces (topography and Z contrast) | |||
* Vizualization of projected image (BF STEM image) | |||
* Energy Dispersive X-ray analysis (EDS) | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | |||
|style="background:LightGrey; color:black" rowspan="2"|Resolution | |||
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of QFEG dependends on the sample and the operation mode! | |||
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* 2 nm at 30 keV for Au on C sample with the ETD detector | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Instrument specifics | |||
|style="background:LightGrey; color:black"|Detectors | |||
|style="background:WhiteSmoke; color:black"| | |||
* ETD- Everhart-Thornley for secondary electrons | |||
* BSD- Solid state Back Scattered Detector | |||
* LFD- Large Field Detector for secondary electrons | |||
* GSED- Gaseous Secondary Electron Detector | |||
* GBSD- Gaseous Backscattered Electron Detector | |||
* GAD- Gaseous Analystical Detector | |||
* STEM- right field Scanning Tramission Electron detector | |||
* vCD- low voltage BSED | |||
* CCD camera | |||
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|style="background:LightGrey; color:black"|Electron source | |||
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* Field Emission - Tungsten filament | |||
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|style="background:LightGrey; color:black"|Stage (room temperature) | |||
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* X, Y: 25 × 25 mm | |||
* T: 0 to 60<sup>o</sup> (Full tilt require removment of cryo cold trap.) | |||
* R: 360<sup>o</sup> | |||
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|style="background:LightGrey; color:black"|Peltier stage | |||
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* FEI Peltier stage -10<sup>o</sup> to 22<sup>o</sup> | |||
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|style="background:LightGrey; color:black"|Cryo stage | |||
|style="background:WhiteSmoke; color:black"| | |||
* Quorum PP2000 Cryo System | |||
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|style="background:LightGrey; color:black"|EDS | |||
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* Oxford Instruments 80 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV | |||
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|style="background:LightGrey; color:black"|Operating pressures | |||
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* High vacuum (10<sup>-4</sup> Pa), Low vacuum and Enviromental mode (up to 2700Pa) | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Sample sizes | |||
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* No actual limit (limitted by stage movment and detector position). | |||
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| style="background:LightGrey; color:black"|Allowed materials | |||
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* Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!) | |||
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=Characterization Techniques= | =Characterization Techniques= | ||