Template:SEM comparison table 314: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 64: | Line 64: | ||
** 4.0nm at 30kV (BSE) | ** 4.0nm at 30kV (BSE) | ||
** > 12nm at 3kV (SE) --> | ** > 12nm at 3kV (SE) --> | ||
| | | | ||
*High Vacuum operation: | |||
**1.0 nm at 15 kV (TLD detector and optimum working distance) | |||
**1.8 nm at 1 kV (TLD detector and optimum working distance) | |||
*Low Vacuum operation: | |||
**1.5 nm at 10 kV (Helix detector and optimum working distance) | |||
**1.8 nm at 3 kV (Helix detector and optimum working distance) | |||
| | | | ||
* High vacuum | * High vacuum | ||