Specific Process Knowledge/Thin film deposition/Deposition of NiFe: Difference between revisions
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Nickel Iron alloy, e.g., Invar, has been sputter deposited in the [[Specific_Process_Knowledge/Thin_film_deposition/Lesker|Sputter-system (Lesker)]] here at Nanolab. | Nickel Iron alloy, e.g., Invar, has been sputter deposited in the [[Specific_Process_Knowledge/Thin_film_deposition/Lesker|Sputter-system (Lesker)]] here at Nanolab. | ||
You will find detailed results of varying the process parameters when sputtering Ni-Fe in the Lesker sputter system [[/Sputtering of NiFe in the Lesker sputter system|here]]. |
Revision as of 13:22, 24 March 2020
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Deposition of Nickel Iron alloy
Nickel Iron alloy, e.g., Invar, has been sputter deposited in the Sputter-system (Lesker) here at Nanolab.
You will find detailed results of varying the process parameters when sputtering Ni-Fe in the Lesker sputter system here.