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Specific Process Knowledge/Thin film deposition/Deposition of Copper: Difference between revisions

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! Comment
! Comment
|As of August 2018, Cu has not yet been deposited in this machine.  
|As of March 2020, Cu has not yet been deposited in this machine.  
Please contact the Thin Film group to develop a process.
Please contact the Thin Film group to develop a process.
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