Specific Process Knowledge/Characterization/XRD: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Measurement temperature | |||
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Room temperature | |||
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May be heated in N<sub><sub>2</sub></sub> up to 500°C | |||
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|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
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