Specific Process Knowledge/Characterization: Difference between revisions
| Line 142: | Line 142: | ||
===Element analysis=== | ===Element analysis=== | ||
*[[/SEM Supra 2|SEM with EDX]] | *[[/SEM Supra 2|SEM with EDX]] | ||
*[[/XPS | *[[/XPS|XPS tools ]] | ||
===Optical and stylus profilers=== | ===Optical and stylus profilers=== | ||