Specific Process Knowledge/Characterization/XPS/XPS technique: Difference between revisions
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; Detection in the analyzer | ; Detection in the analyzer | ||
: In the analyzer the electrons are separated according to the kinetic energy by two concentric spheres held at some potential. By playing on the acceptance angle of the entrance/exit slits of the analyzer one can tune the energy resolution with the parameter called the pass energy. Subsequently detected by the spectrometer, the number of electrons may be plotted as a function of energy thus making up an XPS spectrum. | : In the analyzer the electrons are separated according to the kinetic energy by two concentric spheres held at some potential. By playing on the acceptance angle of the entrance/exit slits of the analyzer one can tune the energy resolution with the parameter called the pass energy. Subsequently detected by the spectrometer, the number of electrons may be plotted as a function of energy thus making up an XPS spectrum. | ||
= More information on XPS = | |||
There is a vast number of textbooks on XPS and the internet/Youtube has plenty information as well. To | |||
serve as introduction to the technique and the required hardware for | |||
as a short and yet thorough , we have chosen a document entitled 'Electron Spectroscopy of surfaces' by Peter S. Deimel and Francesco Allegretti from the Technical University of Munich. | |||