Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The downside of having a much more detailed view of the process is that it is very time consuming to arrive a minimum of reflected powers. Small changes in setpoints of the matching units can have dramatic impact. Quite often it is necessary to introduce shoulders on changes in gas flows to soften the transition in plasma conditions. As a result, the number of necessary parameters in the recipes increases a lot. Below is a few variation of the socalled DREM (see publications in the list below) recipes. All RF matching setpoints are as important as any other parameter. | The downside of having a much more detailed view of the process is that it is very time consuming to arrive a minimum of reflected powers. Small changes in setpoints of the matching units can have dramatic impact. Quite often it is necessary to introduce shoulders on changes in gas flows to soften the transition in plasma conditions. As a result, the number of necessary parameters in the recipes increases a lot. Below is a few variation of the socalled DREM (see publications in the list below) recipes. All RF matching setpoints are as important as any other parameter. | ||
{{Template:Peg1RecipeTableVerBColors | {{Template:Peg1RecipeTableVerBColors | ||
|TableHeader=Variations of the DREM 3kW recipe | |TableHeader=Variations of the DREM 3kW recipe | ||