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Specific Process Knowledge/Lithography: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
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*Resist type, thickness, and pattern dependent
*Resist type, thickness, and pattern dependent
*~1.25 µm and up
*~0.6 µm and up
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*pattern type, shape and pitch dependent
*pattern type, shape and pitch dependent
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