Specific Process Knowledge/Lithography/Baking: Difference between revisions
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==Gamma hotplates== | ==Gamma hotplates== | ||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV | [[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Spin Coater: Gamma UV.]] | ||
Hotplate temperatures are recipe dependent. | Hotplate temperatures are recipe dependent. | ||